Semiconductor device including a plurality of thin film transistors at least some of which have a crystalline silicon film crystal-grown substantially in parallel to the surface of a substrate for the transistor

ABSTRACT

Nickel is introduced to a predetermined region of a peripheral circuit section, other than a picture element section, on an amorphous silicon film to crystallize from that region. After forming gate electrodes and others, sources, drains and channels are formed by doping impurities, and laser is irradiated to improve the crystallization. After that, electrodes/wires are formed. Thereby an active matrix type liquid crystal display whose thin film transistors (TFT) in the peripheral circuit section are composed of the crystalline silicon film whose crystal is grown in the direction parallel to the flow of carriers and whose TFTs in the picture element section are composed of the amorphous silicon film can be obtained.

This application is a continuation-in-part application of Ser. No.160,908 filed Dec. 3, 1993, now U.S. Pat. No. 5,403,772.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a semiconductor device using TFTs (thinfilm transistor) mounted on an insulating substrate such as a glass andmore particularly to a semiconductor device utilizable for an activematrix type liquid crystal display.

2. Description of the Related Art

A semiconductor device having TFTs on an insulating substrate such as aglass is known to be utilized in an active matrix type liquid crystaldisplay, image sensor and the like using such TFTs for driving pictureelements.

Generally a thin film silicon semiconductor is used for the TFT used insuch devices. The thin film silicon semiconductor may be roughlyclassified into two semiconductors; those composed of amorphous silicon(a-Si) semiconductor and those composed of silicon Semiconductor havinga crystallinity. The amorphous silicon semiconductor is most generallyused because its fabrication temperature is low, it can be fabricatedrelatively easily by a vapor phase method and it has amass-producibility. However, because it is inferior as compare to thesilicon semiconductor having a crystallinity in terms of physicalproperties such as an electrical conductivity, it has been stronglydemanded to establish a method for fabricating a TFT composed of thesilicon semiconductor having a crystallinity to obtain a fastercharacteristic. By the way, as the silicon semiconductor having acrystallinity, there are known to exist a polycrystal silicon,microcrystal silicon, amorphous silicon containing crystal components,semi-amorphous silicon having an intermediate state betweencrystallinity and amorphousness.

The following method is known to obtain those thin film siliconsemiconductors having a crystallinity: (1) directly form a film having acrystallinity, (2) form an amorphous semiconductor film and crystallizeit by energy of laser light, and (3) form an amorphous semiconductorfilm and crystallize it by applying thermal energy.

However, it is technically difficult to form a film having favorablephysical properties of semiconductor on the whole surface of a substrateby the method of (1). Further, it has a problem in terms of cost thatbecause its film forming temperature is so high as more than 600° C., alow cost glass substrate cannot be used. The method (2) has a problemthat its throughput is low because an irradiation area is small when aneximer laser which is presently most generally used is used. Further,the laser is not stable enough to homogeneously treat the whole surfaceof a large area substrate. Accordingly, it is thought to be a nextgeneration technology. Although the method (3) has a merit that itallows to accommodate with a large area as compare to the methods (1)and (2), it is also necessary to apply such a high temperature as morethan 600° C. as the heating temperature. Accordingly, the heatingtemperature needs to be reduced in a case of using a low cost glasssubstrate. In particular, because the screen of present liquid crystaldisplay is enlarged more and more, a large size glass substrate needs tobe used accordingly. When such a large size glass substrate is used, itscontraction and strain caused during the heating process indispensablein fabricating the semiconductor produce a large problem that theyreduce an accuracy of mask positioning and the like. In particular,because the strain point of the 7059 glass which is presently mostgenerally used is 593° C., it deforms largely by the conventionalheating crystallization method. Further, beside the problems concerningto the temperature, it takes more than tens of hours as the heating timerequired for the crystallization in the conventional process, so thatsuch time needs to be shortened.

SUMMARY OF THE INVENTION

Accordingly, it is an object of the present invention to solve theaforementioned problems by providing a process which realizes both thereduction of the temperature necessary for the crystallization and theshortening of the heating time in a method for fabricating a thin filmcomposed of silicon semiconductor having a crystallinity using a methodfor crystallizing a thin film composed of amorphous silicon by heating.The silicon semiconductor having a crystallinity fabricated by using theprocess of the present invention has physical properties equal to orsuperior than those of the silicon semiconductor fabricated by the priorart and is usable for an active layer region of TFTs.

The inventors of the present invention perform the following experimentsand study concerning to the method of forming a silicon semiconductorfilm by a CVD method or sputtering method and crystallizing the film byheat.

When, after an amorphous silicon film is formed at first on a glasssubstrate, a mechanism of crystallizing the film by heating is studiedthrough experiments, it is recognized that the crystal growth beginsfrom the interface between the glass substrate and the amorphous siliconand it proceeded in a columnar shape vertical to the surface of thesubstrate if the thickness of the film is more than a certain value.

The above phenomenon is considered to have been caused because crystalnuclei (seeds) which would become bases of crystal growth existed at theinterface of the glass substrate and the amorphous silicon film and thecrystals grow from the nuclei. Such crystal nuclei are considered tohave been impurity metal elements and crystal components (crystalcomponents of silicon oxide is considered to be existing on the surfaceof glass substrate as it is called as a crystallized glass) whichexisted on the surface of the substrate in a very small amount.

Then the inventors consider that it is possible to lower thecrystallization temperature by positively introducing the crystalnuclei. In order to confirm that effect, the inventors try experimentsby forming a film of a very small amount of another metal on the glasssubstrate, forming a thin film composed of amorphous silicon thereon andthen heating and crystallizing it. As a result, it is confirmed that thecrystallization temperature reduces when several metals are formed onthe substrate and therefore it is presumed that crystal grows centeringon foreign materials as the crystal nuclei. Then the inventors study themechanism in more detail on the plurality of impurity metals forreducing; the temperature. The plurality of impurity elements are Ni,Fe, Co, Pd and Pt.

It can be considered that the crystallization has two stages; an initialstage of producing a nucleus and a stage of crystal growth from thenucleus. While the speed of the initial nucleus production stage may beobserved by measuring a time until a spot microcrystal is produced in afixed temperature, this time is shortened any time when an amorphoussilicon thin film is formed using the impurity metals as the base andthe effect of the introduction of the crystal nucleus on the lowering ofthe crystallization temperature is verified. Further, unexpectedly, itis observed that the speed of the crystal growth after the production ofnucleus also remarkably increases in the crystallization of theamorphous silicon thin film formed on a certain metal after forming itwhen the growth of the crystal grain after the production of nucleus isstudied by varying heating time. Although this mechanism is notclarified yet, it is presumed that some catalytic effect is acting.

In any case, it is found that when the thin film composed of amorphoussilicon is formed on the film of a very small amount certain metalformed on the glass substrate and is then heated and crystallized, asufficient crystallinity can be obtained due to the two effectsdescribed above at a temperature less than 580° C. and in about 4 hourswhich have been impossible in the past. Nickel has the most remarkableeffects among impurity metals having such effect and is an elementselected by the inventors.

How nickel is effective will now be exemplified. Although more than 10hours of heating time is necessary in crystallizing a thin film composedof amorphous silicon formed by a plasma CVD method on a substrate(Coning 7059 glass), on which a thin film containing a very small amountof nickel is not formed, by heating in a nitrogen atmosphere when theheating temperature is 600° C., the same crystallization state can beobtained by heating at 580° C. for about 4 hours when the thin filmcomposed of amorphous silicon formed on the substrate on which the thinfilm containing a very small amount of nickel is formed is used. By theway, Raman spectroscopic spectrum is used in the judgment(determination) of the crystallization at this time. It can be seen thatthe effect of nickel is very great even only from this fact.

As it is apparent from the above explanation, it is possible to lowerthe crystallization temperature and to shorten the time required for thecrystallization when the thin film composed of amorphous silicon isformed on the thin film of a very small amount of nickel. Now a moredetailed explanation will be made assuming that this process is used infabricating TFTs. By the way, the nickel thin film has the same effecteven if it is formed on the amorphous silicon film, not only on thesubstrate, and in the case of ion implantation as described later indetail. Accordingly, such a series of process shall be called as "nickelmicro-adding". Technically it is also possible to implement the nickelmicro-adding during when the amorphous silicon film is formed.

At first, the method of nickel micro-adding will be explained. The bothof the method of forming the thin film of a small amount of nickel onthe substrate and of forming the film of amorphous silicon thereafterand of the method of forming the film of amorphous silicon at first andof forming the thin film of a small amount of nickel thereon have thesame effect of lowering the temperature by adding a small amount ofnickel. Further, it is clarified that any of the methods of sputteringmethod, vapor deposition method, spin coating method and a method usingplasma may be used in forming the film. However, when the thin filmcontaining a small amount of nickel is formed on the substrate, theeffect is more remarkable when a thin film (base film) of silicon oxideis formed on the substrate and then the thin film of a small amount ofnickel is formed on the base film rather than when the thin film of asmall amount of nickel is formed directly on the 7059 glass substrate.The reason is that it is important for the low temperaturecrystallization of the present invention that silicon and nickeldirectly contact and that components other than silicon may disturb thecontact or reaction of the both in the case of the 7059 glass.

Further, as for the method of nickel micro-adding, it is confirmed thatalmost the same effect can be obtained by adding (introducing) nickel byion implantation, other than the methods of forming the thin filmcontacting above or under the amorphous silicon. For nickel, it isconfirmed that the temperature can be lowered when an amount of morethan 1×10¹⁵ atoms/cm³ is added. However, because a shape of peak ofRaman spectroscopic spectrum becomes apparently different from that ofsimple substance of silicon when the added amount is more than 5×10¹⁹atoms/cm³, an actual usable range is considered to be from 1×10¹⁵atoms/cm³ to 1×10¹⁹ atoms/cm³. When the nickel concentration is 1×10¹⁵atoms/cm³, the action as a catalyst for the crystallization decreases.Further, when the concentration is more than 5×10¹⁹ atoms/cm³, NiSi islocally produced, losing the characteristics of semiconductor. In thecrystallized state, the lower the nickel concentration, the morefavorably the semiconductor may be used.

Next, the configuration of the crystal when the nickel micro-adding isperformed will be explained. It is known that when no nickel is added,nuclei are produced at random from the crystal nuclei at the interfaceof the substrate and the like, that the crystals grow at random from thenuclei until a certain thickness and that columnar crystals in which(110) direction is arranged in a direction vertical to the substrategenerally grow in a thicker thin film as described above and an almostuniform crystal growth is observed across the whole thin film as amatter of course. Contrary to that, when a small amount of nickel isadded, the crystal growth is different at a region into which the nickelis added and at the surrounding section. That is, it is clarifiedthrough pictures of a transmission electron beam microscope that in theregion into which nickel is added, the added nickel or a compound ofnickel and silicon become the crystal nucleus and columnar crystal growsalmost vertical to the substrate similarly to one into which no nickelis added. It is also confirmed that the crystallization proceeds in alow temperature also in the surrounding region where no nickel is added.A peculiar crystal growth that the direction vertical to the substrateis arrayed in (111) in that portion and needle or columnar crystal growsin parallel to the substrate, is seen. It is observed that some largecrystals among the crystals grown in the lateral direction parallel tothe substrate grow as long as several hundreds micron from the regionwhere a small amount of nickel is added and is found that the growthincreased in proportional to the increase of time and rise oftemperature. For example, a growth of about 40 micron is observed inheating at 550° C. for 4 hours. Further, it is clarified that the largecrystals in the lateral direction are all single-crystal like accordingto pictures taken by the transmission electron beam microscope. When thenickel concentration is examined at the portion where a small amount ofnickel is added, at the nearby lateral growth portion and at the furtherdistant amorphous portion (the low temperature crystallization does notoccur at the considerably distant portion and the amorphous portionremains as it is) by SIMS (secondary ion mass spectrometry), less amountof nickel by about 1 digit from the portion where a small amount ofnickel is added is detected from an amount of the lateral growth portionand it is observed that it diffuses within the amorphous silicon.Further less amount of nickel by about 1 digit is observed in theamorphous portion. Although the relationship between this fact and thecrystal configuration is not clear yet, it is possible to form a siliconthin film having a crystallinity of desired crystal configuration at adesired section by controlling a nickel adding amount and an addingposition.

Next, electrical characteristics of the nickel micro-added portion wherea small amount of nickel is added and the nearby lateral growth portionwill be explained. Among the electrical characteristics of the nickelmicro-added portion, an electrical conductivity is almost the same withthe film into which no nickel is added, i.e. the film crystallized atabout 600° C. for tens of hours. When an activation energy is found fromthe temperature dependency of the electrical conductivity, no behaviorconsidered to have been caused by the level of nickel is observed whenthe nickel added amount is 10¹⁷ atoms/cm³ to 10¹⁸ atoms/cm³. As far asthis fact is concerned, it can be concluded that there is no problem inthe operation of TFT if the nickel concentration within the film used inan active layer of TFT and others is less than around 10¹⁸ atoms/cm³.

Contrary to that, the electrical conductivity of the lateral growthportion is higher than that of the nickel micro-added portion by morethan 1 digit, which is considerably high for a silicon semiconductorhaving a crystallinity. This fact is considered to have been caused bythat less or almost no crystal boundaries existed between electrodeswhere electrons pass through because the current passing direction andthe crystal lateral growth direction coincides; it coincides with theresult of the pictures of the transmission electron beam microscopewithout contradiction. That is, it coincides with the observation factthat the needle or columnar crystals grow in the direction parallel tothe substrate.

Here, based on the various characteristics described above, an applyingmethod for a TFT will be explained. As an application field of the TFT,an active type liquid crystal display in which TFTs are used for drivingpicture elements will be assumed here.

While it is important to suppress a contraction of the glass substratein the late large screen active type liquid crystal display as describedabove, the use of the nickel micro-adding process of the presentinvention allows to crystallize at a fully lower temperature as compareto the strain point of glass and is especially suitable. The presentinvention allows to replace a conventionally used amorphous silicon withsilicon having a crystallinity by adding a small amount of nickel and bycrystallizing in about 450° to 550° C. for about 4 hours. Although itmay be necessary to change design rules and others corresponding tothat, it can be fully accommodated with the conventional equipments andprocess and its merit is considered to be great.

Furthermore, the present invention allows to form TFTs used for pictureelements and those forming the drivers of the peripheral circuitseparately utilizing the crystal configurations corresponding to eachcharacteristic and hence is useful when it is applied especially for theactive type liquid crystal display. That is, the TFTs used for thepicture element are not required to have so much mobility and ratherthan that, there is more merit for the off current to be smaller. Thenthe present invention allows to remain the region which is to become theTFT used for the picture element as amorphous without performing thenickel micro-adding and to grow a crystalline silicon film on the regionfor forming the driver of the peripheral circuit by adding a smallamount of nickel. That is, although so much mobility is not required inthe TFT formed in the picture element section, the off current needs tobe reduced to improve the yield and to hold electric charge.Accordingly, it is useful to use TFTs using an amorphous silicon filmwhose production technology has been accumulated from the past and whosecharacteristics can be readily controlled in the picture elementsection. On the other hand, considering to apply the liquid crystaldisplay for a workstation for the future, a very high mobility isrequired for the TFTs structuring the peripheral circuit. Then it iseffective to fabricate TFTs having a very high mobility by adding asmall amount of nickel near the TFTs which form the drivers of theperipheral circuit to grow crystals in one direction (growth in lateraldirection) from there and to cause the crystal growth direction tocoincide with the current passing direction (direction into whichcarriers move).

That is, an object of the present invention is to provide the region inwhich the silicon semiconductor film is selectively crystallized and theregion left as being amorphous to selectively fabricate TFTs satisfyingnecessary characteristics on a substrate in a semiconductor device inwhich a large number of thin film transistors (generally called as TFT)are formed on the substrate such as a glass substrate. Another object ofthe present invention is to selectively provide the TFT having a highermobility by causing the crystal growth direction to coincide with thecarrier moving direction within the TFT by paralleling it with thesubstrate.

According to the present invention, the TFT using a crystalline siliconfilm and the TFT using an amorphous silicon film may be selectivelyobtained at each necessary region by selectively obtaining the TFThaving a high mobility by causing the direction into which carriers moveduring operation of the TFT to approximately coincide with the crystalgrowth direction and by selectively providing the TFT using theamorphous silicon film in the other region.

As described above, the crystal growth direction may be freely selectedin the direction either vertical to the substrate or parallel to thesubstrate by adding a small amount of nickel. Further, the relationshipof the direction into which carriers flow during operation of the TFTand the crystal growth direction may be determined selected by selectinga direction (direction connecting a source and drain) and position ofthe TFT to be formed. The direction into which carriers flow describedabove is the direction connecting the source and drain when an insulatedgate type field effect semiconductor device is used for example as theTFT.

The present invention may be used for an active matrix type liquidcrystal display. Further, the TFT having a high mobility may be obtainedby using the crystalline silicon film whose crystal has grown in thedirection parallel to the surface of substrate.

Further, the present invention relates to a fabrication process forobtaining such TFTs as described above. The present invention utilizes atechnology for selectively providing crystallized regions by adding asmall amount nickel.

Furthermore, the present invention is characterized in that the TFTsusing the crystalline silicon film are formed at the peripheral circuitsection of the liquid crystal display and that the crystal of thecrystalline silicon film composing the TFT has been grown approximatelyin the same direction with the moving direction of carriers within theTFT. Further, the TFTs composing the picture element section of theliquid crystal display is structured in the same time using theamorphous silicon film. The selective formation of the crystallinesilicon film and amorphous silicon film on the same substrate may berealized by selectively adding nickel. That is, because the temperaturerequired for the crystallization can be less than 550° C. in the regionwhere nickel micro-adding is performed, the amorphous region which doesnot crystallize at 550° C. (although it is considered to crystallize inmore than hundreds of hours, it will not crystallize at 550° C. inseveral hours) can be left in the region where no nickel is added.

Although it is typically useful to use nickel as a small amount of metalelement for promoting the crystallization, the similar effect can beobtained even by cobalt, iron and platinum in the present invention.Further, although a kind of substrate is not specifically limited, theusefulness of the present invention that the crystalline silicon filmcan be obtained in a low temperature less than 600° C. as compare to theconventional method become remarkable when it is used for a glasssubstrate and particularly for a large area glass substrate.

While the crystalline silicon film may be thus obtained by selectivelycrystallizing it, the characteristics of such crystalline silicon filmmay be improved further by irradiating laser or an equivalent stronglight after the crystallization process. That is, insufficientlycrystallized components left at the crystal boundaries and others may becrystallized due to that. By the way, it is necessary for the region inwhich the TFT using the amorphous silicon film is formed not to beirradiated by such strong light, because the amorphous silicon iscrystallized by the irradiation of such strong light.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a drawing showing a schematic construction of a liquid crystaldisplay according to an embodiment of the present invention;

FIGS. 2A through 2D are drawings showing a process for fabricating acircuit in which NTFT and PTFT which compose a peripheral circuitsection of the liquid crystal display are formed complementarilyaccording to the embodiment of the present invention;

FIG. 3 is a drawing showing the configuration shown in FIG. 2D seen fromthe above;

FIGS. 4A through 4D are drawings showing a process for fabricating aNTFT formed in a picture element section in the liquid crystal displayaccording to the embodiment of the present invention;

FIGS. 5A through 5E are drawings showing a process for fabricating TFTcircuits in the peripheral circuit section and picture element sectionin the liquid crystal display according to another embodiment of thepresent invention; and

FIGS. 6A and 6B are SEM pictures around the distal end of crystallizedregion of a silicon film crystallized by a growth in a lateral directionin the fabricated TFT.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

Referring now to the drawings, preferred embodiments of the presentinvention will be explained.

First Embodiment

FIG. 1 is a top plan view showing a construction of a liquid crystaldisplay of the embodiment of the present invention in outline, wherein apicture element section 10 having a plurality of picture elementelectrodes provided in matrix (not shown) and a peripheral circuitsection 20 as a driving circuit for driving each of the picture elementelectrodes are shown. According to the present embodiment, thin filmtransistors (TFT) for driving the picture elements and those composingthe peripheral circuit are formed on an insulated substrate (e.g. aglass substrate). In concrete, the peripheral circuit section is acircuit structured as a CMOS in which P channel type TFTs (PTFT) and Nchannel type TFTs (NTFT) using silicon films having a crystallinitygrown in the lateral direction (called as a crystalline silicon film)are provided complementarily and the picture element section is TFTsformed as NTFT using amorphous silicon films.

FIGS. 2A to 2D are drawings showing a process for fabricating thecircuit in which the NTFT and PTFT structuring the peripheral circuitsection 20 are formed complementarily. FIGS. 4A to 4D described laterare drawings showing a process for fabricating the NTFT formed on thepicture element section. Because the both fabricating processes areperformed on the same substrate, common processes are executedsimultaneously. That is, the processes shown in FIGS. 2A to 2D and thoseshown in FIGS. 4 A to 4D correspond each other, so that they are carriedout in the same time, respectively.

At first, a silicon oxide base film 102 having a thickness of 2000angstrom is form on a glass substrate (Coning 7059) 101 by a sputteringmethod. A mask 103 formed by a metal mask or silicon oxide film isprovided only on the peripheral circuit section 20 as shown in FIG. 2A.By the way, because nickel introduced in a later process easily diffusesalso within the silicon oxide film, a thickness of more than 1000angstrom is necessary when the silicon oxide film is used as the mask103. The base film 102 is exposed in a slit shape by the mask 103. Thatis, seeing the state of FIG. 2A from above, the base film 102 is exposedin the slit shape by a slit shape region 100 while the other region ismasked. The mask 103 is covered on the whole surface of the pictureelement section 10 shown in FIG. 4A and the base film 102 is masked bythe mask 103.

After providing the mask 103, a nickel silicide film (chemical formula:NiSi_(x), 0.4≦×2.5,×=2.0 for example) having a thickness of 5 to 200angstrom, e.g. 20 angstrom, is formed by a sputtering method. As aresult, the nickel silicide film is formed over the whole area of theperipheral circuit section 20 and the picture element section 10. Afterthat, the mask 103 is removed to selectively form the nickel silicidefilm only on the region 100. That is, it means that the nickelmicro-adding has been selectively made on the region 100.

Next, after removing the mask 103, an intrinsic (I type) amorphoussilicon film 104 having a thickness of 500 to 1500 angstrom, e.g. 1000angstrom, is deposited by a plasma CVD method. After that, it iscrystallized by annealing for 4 hours at 550° C. under a hydrogenreducing atmosphere (preferably a partial pressure of hydrogen is 0.1 to1 atmospheric pressure). Although the annealing temperature may beselected within a range of about 450° C. to 700° C., a preferablytemperature range is 450° C. to 550° because it takes time for theannealing if the annealing temperature is low and the same result asthat in the prior art is obtained about if the temperature is high. Bythe way, this annealing may be carried out in an inactive atmosphere(e.g. a nitrogen atmosphere) or air.

The silicon film 104 is crystallized in a direction vertical to thesubstrate 101 in the region 100 where the nickel silicide film has beenselectively formed. On the other hand, crystal grows in a lateraldirection (direction parallel to the substrate) from the region 100 asshown by arrow 105 in the peripheral region of the region 100. Theamorphous silicon film is left at the picture element section 10 (seeFIG. 4B) where the mask 103 is provided, because the amorphous siliconfilm will not crystallize by such annealing of four hours at 550° C. Bythe way, a distance of crystal growth in the direction shown by thearrow 105 which is parallel to the substrate 101 is about 40 micron.

The amorphous silicon film at the peripheral circuit section 20 may becrystallized by the process described above. Here, the crystal grows inthe lateral direction (direction parallel to the substrate 101) as shownin FIG. 2 B in the peripheral circuit section 20 and the amorphoussilicon film remains without being crystallized in the picture elementsection 10.

After that, TFTs are separated between the elements and the silicon film104 at unnecessary part is removed to form an island-shape elementregions. In this process, if a length of an active layer of the TFT(source/drain region, channel forming region) is within 40 micron, thesource/drain region and channel region may be structured by thecrystalline silicon film grown in the direction parallel to thesubstrate 101. Further, if the channel forming region is structured bythe crystalline silicon film, the length of the active layer may beprolonged further.

Then a silicon oxide film 106 having a thickness of 100 0 angstrom isformed as a gate insulating film by a sputtering method. Silicon oxideis used as a target in the sputtering. A temperature of the substrateduring the sputtering is 200° to 400° C., e.g. 350° C. Oxygen and argonare used as an atmosphere of the sputtering and a ratio of theargon/oxygen=0 to 0.5, e.g. less than 0.1. Following to that, analuminum film (containing silicon by 0.1 to 2%) having a thickness of6000 to 8000 angstrom, e.g. 6000 angstrom, is formed by a sputteringmethod. By the way, it is desirable to consecutively carry out theprocesses for forming the silicon oxide film 106 and aluminum film.

Gate electrodes 107 and 109 are formed by patterning the formed aluminumfilm. As mentioned above, the process shown in FIG. 2C and that shown inFIG. 4C are carried out simultaneously.

The surface of the gate electrodes 107 and 109 is anodized to form oxidelayers 108 and 110 on the surface thereof. This anodization is carriedout in an ethylene glycol solution containing tartaric acid by 1 to 5%.A thickness of the oxide layers 108 and 110 is 2000 angstrom.

By the way, because the thickness of the oxide layers 1 08 and 110 is athickness of an offset gate region formed in an ion doping process (aprocess for ion implanting a doping material) in the later process, alength of the offset gate region may be determined in the anodizingprocess.

Next, impurities (phosphorus and boron) are implanted to the siliconregions as regions of elements using the gate electrode 107 andsurrounding oxide layer 108 and the gate electrode 109 and thesurrounding oxide layer 110 respectively as masks. Phosphine (PH3) anddiborane (B₂ H₆) are used as doping gas. An acceleration voltage is 60to 90 kV, e.g. 80 kV, in the case of phosphine and 40 to 80 kV, e.g. 65kV, in the case of diborane. Dosage is 1×10¹⁵ to 8×10¹⁵ cm⁻², e.g.2×10¹⁵ cm⁻² of phosphorus and 5×10¹⁵ cm⁻² of boron. In the doping, eachelement are selectively doped by covering regions which are notnecessary to be doped by photoresist. As a result, N type impurityregions 114 and 1 16 and P type impurity regions 111 and 113 are formedand hence, a P channel type TFT (PTFT) region and N channel type TFT(NTFT) region may be formed. Further, a N channel type TFT may be formedin the same time as shown in FIG. 4C.

After that, annealing is carried out by irradiating laser light toactivate the ion implanted impurities. Although KrF eximer laser(wavelength: 248 nm, pulse width: 20 nsec) is used for the laser light,another laser may be used. As laser light irradiating conditions, 2 to10 shots, e.g. 2 shots, of Laser light having an energy density of 200to 400 mJ/cm², e.g. 250 mJ/cm², are irradiated per one spot. It isuseful to heat up the substrate to around 200° to 450° C. during theirradiation of laser light. Because nickel has diffused in the regionpreviously crystallized, the recrystallization readily advances byirradiating the laser light in the laser annealing process. Accordingly,the impurity regions 111 and 113 into which the impurity giving P typehas been doped and the impurity regions 114 and 116 into which theimpurity giving N type has been doped may be readily activated.

Following to that, a silicon oxide film 118 having a thickness of 6000angstrom is formed as an interlayer insulator at the peripheral circuitsection 20 as shown in FIG. 2D by a plasma CVD method. After formingcontact holes on the interlayer insulator, electrode and wires 117, 119and 120 of the TFTs are formed by a multi-layered film of titaniumnitride and aluminum. At the picture element section 10, an interlayerinsulator 211 is formed by silicon oxide and after forming contactholes, metal wires 213, 214 and ITO electrode 212 which are used as apicture element electrode are formed as shown in FIG. 4D. Finally, anannealing is carried out for 30 minutes at 350° C. in a hydrogenatmosphere of one atmospheric pressure to complete the TFT circuit orTFTs.

The circuit fabricated as described above has a CMOS structure in whichthe PTFT and NTFT are provided complementarily. However, it is alsopossible to fabricate two independent TFTs simultaneously in the processdescribed above by cutting into two TFTs after fabricating themsimultaneously.

Here, in order to show a positional relationship between the region intowhich nickel has been selectively introduced and the TFTs, a view ofFIG. 2D seen from above is shown in FIG. 3. In FIG. 3, the nickelmicro-adding is selectively performed to the region 100 and crystalgrows in a lateral direction (lateral direction in the sheet) from thelocation into which nickel has been added by the thermal annealing. Thesource/drain regions 111 and 113 and the channel forming region 112 areformed as the PTFT in the direction to which the crystal grows.Similarly, the source/drain regions 114 and 116 and the channel formingregion 115 are formed as the NTFT.

Because a direction into which carriers flow and the direction ofcrystal growth coincide in the structure described above, the carriersdo not cross the crystal boundary when mowing, hence allowing to improvethe operation of the TFTs. For example, a mobility of the PTFTfabricated by the process shown in FIGS. 2A to 2D is 120 to 150 cm² /Vsand it has been confirmed that the mobility has been improved incomparison with a mobility of the prior art PTFT of 50 to 60 cm² /Vs.Further, a mobility of 150 to 180 cm² /Vs is obtained in the NTFT, whichis higher is comparison with a mobility of the prior art NTFT of 80 to100 cm² /Vs.

By the way, the prior art TFT mentioned here refers to a TFT using acrystal silicon film obtained by crystallizing an amorphous silicon filmformed on a glass substrate by a thermal annealing of 24 hours at 600°C.

Further, a gate insulating film and channel forming region are providedunder the gate electrodes in FIGS. 2C and 2D. As seen from FIG. 3, aplurality of TFTs may be simultaneously formed by further prolonging (byvertically extending in FIG. 3) the nickel micro-adding region.

Although the method of selectively forming nickel as a thin film(because it is extremely thin, it is difficult to observe as a film) onthe surface of the base film 102 under the amorphous silicon film 104and of growing the crystal from that portion has been adopted as themethod for introducing nickel, it is also possible to selectivelyperform the nickel micro-adding after forming the amorphous silicon film104. That is, it is possible to grow the crystal from the top or bottomside of the amorphous silicon film. Further, it is also possible toadopt a method of forming the amorphous silicon film previously and ofselectively implanting nickel ions into the amorphous silicon film 104using the ion doping method. This method has a merit that aconcentration of the nickel element may be controlled.

Further, it is not always necessary to parallel the crystal growthdirection with the direction of the flow of carriers. Characteristics ofthe TFTs may be controlled by arbitrarily setting an angle between thedirection into which carriers flow and the crystal growth direction.

Second Embodiment

A second embodiment is shown in FIGS. 5A to 5E and FIGS. 6A and 6B.After forming a silicon oxide film 502 having a thickness of 1000 to5000 angstrom, e.g. 2000 angstrom, on a glass substrate 501, anamorphous silicon film 503 having a thickness of 300 to 1500angstrom,e.g. 500 angstrom, is formed by a plasma CVD method. Further, upon that,a silicon oxide film 504 having a thickness of 500 to 1500 angstrom,e.g. 500 angstrom, is formed. It is desirable to form those filmsconsecutively. After that, the silicon oxide film 504 is selectivelyetched to form a window region 506 for introducing nickel. The windowregion 506 is formed in a region for fabricating TFTs for a peripheraldriving circuit and not formed in the picture element section.

Next, a nickel salt film 505 is formed by a spin coating method. Herethe spin coating method will be explained. At first, for the film 505,nickel acetate or nickel nitrate is diluted by water or ethanol. Itsconcentration is 25 to 200 ppm, e.g. 100 ppm.

On the other hand, the substrate is dipped or immersed into a hydrogenperoxide solution or a mixed solution of hydrogen peroxide and ammoniato form a very thin silicon oxide film at the window region 506 which isa section where the amorphous silicon film is exposed to improve theinterface affinity of the nickel solution prepared as described aboveand the amorphous silicon film.

The substrate treated as such is placed in a spinner and is slowlyrotated. Then 1 to 10 ml, e.g. 2 ml, of nickel solution is dropped onthe substrate to expand the solution over the whole surface of thesubstrate. This state is maintained for 1 to 10 minutes, e.g. 5 minutes.After that, the speed of rotation is increased to carry out spin drying.This operation may be repeated for a plurality of times. Thereby thethin nickel salt film 505 is formed (FIG. 5A).

Here a heat treatment is carried out in a heating furnace within a rangeof 520° to 580° C. and 4 to 12 hours, e.g. at 550° C. for 8 hours. Theatmosphere is nitrogen. As a result, nickel diffuses into the region 507right under the window region 506 and crystallization starts from thisregion. After that, the crystallized region expands into the surroundingarea as shown by arrows 508. On the other hand, the region distant fromthe window region 506 is not crystallized and remains as amorphoussilicon 509 (FIG. 5B).

After that, the crystallinity is improved further by irradiating KrFeximer laser light (wavelength: 248 nm) or XeCl eximer laser light(wavelength: 308 nm) by 1 to 20 shots, e.g. 5 shots, in air or oxygenatmosphere. The energy density of the laser light is 200 to 350 mJ/cm²and the temperature of the substrate is 200° to 400° C. By the way, thepicture element section is covered by a metal mask 510 so as not to beirradiated by the laser light. Or it is possible to reshape the beamshape of the laser light into a line shape and others so that the laserlight is not incident to the picture element section (FIG. 5C).

After irradiating the laser, the silicon film 503 is etched to form aTFT region of the peripheral circuit and that of the picture elementsection. The former is composed of the crystalline silicon film and thelater, the amorphous silicon film. Then a silicon oxide film 511 havinga thickness of 1000 to 1500 angstrom, e.g. 1200 angstrom, is formed onthe whole surface and gate electrodes 512, 513 and 514 are formed byaluminum and anodized film thereof similarly to the case of the firstembodiment. The gate electrode 512 is used for a PTFT in the peripheralcircuit, gate electrode 513 is used for a NTFT in the peripheral circuitand gate electrode 514 is used for a TFT in the picture element section.

Using those gate electrodes as masks, N type and P type impurities areimplanted to the silicon film by an ion doping method similarly to thefirst embodiment. As a result, a source 515, channel 516 and drain 517of the PTFT in the peripheral circuit, a source 520, channel 519 anddrain 518 of the NTFT in the peripheral circuit, a source 52 1, channel522 and drain 523 of the NTFT in the picture element section are formed.After that, the laser is irradiated on the whole surface to activate thedoped impurities similarly to the first embodiment (FIG. 5D).

A silicon oxide film 524 having a thickness of 3000 to 8000 angstrom,e.g. 5000 angstrom, is formed as an interlayer insulator. Further, anITO film having a thickness of 500 to 1000 angstrom, e.g. 800 angstrom,is formed by a sputtering method and it is pattern-etched to form apicture element electrode 525. Contact holes are formed at thesource/drain of the TFTs, a two layered film of titanium nitrate(thickness: 1000 angstrom) and aluminum (thickness: 5000 angstrom) isdeposited and it is pattern-etched to form electrodes and wires 526through 530. Thus the peripheral circuit can be formed by crystallinesilicon and the picture element section can be formed by amorphoussilicon (FIG. 5E).

According to the present embodiment, laser is irradiated as shown inFIG. 5C to crystallize amorphous components left within the siliconcrystals grown in a needle shape. Further, the needle crystal iscrystallized so that it becomes fat centering on the needle crystal asthe nucleus. It results in expanding a region where current flows andallows for larger drain current to flow.

The silicon film thus crystallized is thinned and then is observed by atransmission type electron microscope (TEM). FIG. 6A is a picture aroundthe distal end of crystallized region of the silicon film crystallizedby the growth in the lateral direction and the needle crystal can beobserved. As seen from FIG. 6A, many non-crystallized amorphous regionsexist among the crystals.

When it is irradiated by the laser under the condition of the presentembodiment, a picture as shown in FIG. 6B is obtained. Although theamorphous regions which have occupied the most of the area in FIG. 6Aare crystallized by this process, an electrical characteristic is not sogood because the crystallized regions are produced at random. Noticed isthe state of crystal in the region which is considered to have beenamorphous among the needle crystals observed around the middle. A fatcrystal region is formed in this region in a manner growing from theneedle crystal (FIG. 6B).

While the pictures in FIGS. 6A and 6B represent the distal end region ofthe crystal where relatively more amorphous regions exist are observedto readily understand the state of the crystal growth, it is the samealso around the nuclei of the crystal and middle of the crystal growth.Thus the amorphous portion can be reduced, the needle crystal can befattened and the characteristics of the TFT can be improved further byirradiating laser.

As described above, the TFTs in the peripheral circuit section arecomposed of the crystalline silicon film whose crystal is grown in thedirection parallel to the flow of carriers and the TFT in the pictureelement section is composed of the amorphous silicon film in the activematrix type liquid crystal display. Thereby a high speed operation canbe executed in the peripheral circuit section and switching elementswhose off current value is small which are required to hold electriccharge may be provided in the picture element section.

What is claimed is:
 1. A semiconductor device, comprising:a substrate;and a plurality of thin film transistors formed on the substrate,wherein a first part of the plurality of thin film transistors has acrystalline silicon film including crystals having a crystal growthdirection approximately in parallel to a surface of the substrate and asecond part of the plurality of thin film transistors has an amorphoussilicon film.
 2. A semiconductor device according to claim 1 whereineach of the thin film transistors formed on the substrate includes asource region, a channel region, and a drain region and wherein saidcrystalline silicon film extends through at least the channel region ofeach of said thin film transistors of said first part of the pluralityof thin film transistors.
 3. A semiconductor device, comprising:asubstrate; and a plurality of thin film transistors formed on thesubstrate, wherein a first part of the plurality of thin filmtransistors is provided as a peripheral circuit section of an activematrix type liquid crystal display and a second part of the plurality ofthin film transistors is provided as a picture element section of theactive matrix type liquid crystal display, and the thin film transistorsprovided as the peripheral circuit section have a crystalline siliconfilm including crystals having a crystal growth direction parallel to asurface of the substrate and the thin film transistors provided as thepicture element section have an amorphous silicon film.
 4. Asemiconductor device according to claim 3 wherein each of the thin filmtransistors formed on the substrate includes a source region, a channelregion, and a drain region and wherein said crystalline silicon filmextends through at least the channel region of each of said thin filmtransistors of said first part of the plurality of thin filmtransistors.
 5. An active matrix type liquid crystal display,comprising:a picture element section having a plurality of thin filmtransistors respectively associated with a plurality of picture elementelectrodes and driving circuit means including a plurality of thin filmtransistors for driving the thin film transistors of the picture elementsection, wherein the thin film transistors of the driving circuit meanseach has a substrate and has a crystalline silicon film includingcrystals having a crystal growth direction approximately parallel to thesurface of the substrate and the thin film transistors of the pictureelement section each has an amorphous silicon film.
 6. An active matrixtype liquid crystal display according to claim 5 wherein each of thethin film transistors of the driving circuit means includes a sourceregion, a channel region, and a drain region and wherein saidcrystalline silicon film extends through at least said channel region.7. A semiconductor device comprising:a substrate; and a plurality ofthin film transistors formed on the substrate, wherein at least one ofthe thin film transistors has a crystalline silicon film includingcrystals having a crystal growth direction in parallel to the substrateand at least another one of the thin film transistors has an amorphoussilicon film, and wherein the crystalline silicon film includes a metalelement.
 8. The device of claim 7 wherein the metal element includes oneof Ni, Fe, Co, Pd and Pt.
 9. A semiconductor device comprising:asubstrate; and a plurality of thin film transistors formed on thesubstrate, wherein at least one of the thin film transistors has acrystalline silicon film including crystals having a crystal growthdirection in parallel to the substrate and at least another one of thethin film transistors has an amorphous silicon film, and wherein thecrystalline silicon film and the amorphous silicon film each includes ametal element and a concentration of the metal element included in thecrystalline silicon film is higher than that included in the amorphoussilicon film.
 10. The device of claim 9 wherein the metal elementincludes one of Ni, Fe, Co, Pd and Pt.
 11. A semiconductor devicecomprising:a substrate; and a plurality of thin film transistors formedon the substrate, wherein at least one of the thin film transistors hasa crystalline silicon film including crystals having a crystal growthdirection in parallel to the substrate and at least another one of thethin film transistors has an amorphous silicon film, and wherein thecrystalline silicon film include a metal element and has aconcentrations of 1×10¹⁵ to 5×10¹⁹ atoms/cm³.
 12. The device of claim 11wherein the metal element includes one of Ni, Fe, Co, Pd and Pt.
 13. Asemiconductor device comprising:a substrate; and a plurality of thinfilm transistors formed on the substrate, wherein at least one of thethin film transistors has a crystalline silicon film including crystalshaving a crystal growth direction in parallel to the substrate and atleast another one of the thin film transistors has an amorphous siliconfilm, and wherein the crystalline silicon film and the amorphous siliconfilm each includes a metal element, a concentration of the metal elementincluded in the crystalline silicon film is higher than that included inthe amorphous silicon film, and the concentration of the metal elementincluded in crystalline silicon film is 1×10¹⁵ to 5×10¹⁹ atoms/cm³. 14.The device of claim 13 wherein the metal element includes one of Ni, Fe,Co, Pd and Pt.
 15. A semiconductor device comprising:a substrate havinga glass strain point of 593° C. or less; and a plurality of thin filmtransistors formed on the substrate, wherein at least one of the thinfilm transistors has a crystalline silicon film including crystalshaving a crystal growth direction in parallel to the substrate and atleast another one of the thin film transistors has an amorphous siliconfilm.
 16. The device of claim 15 wherein the substrate includes Corning7059.
 17. A semiconductor device comprising:a substrate; and a pluralityof thin film transistors formed on the substrate, wherein at least oneof the thin film transistors has a crystalline silicon film includingcrystals having a crystal growth direction which coincides with acarrier moving direction and at least another one of the thin filmtransistors has an amorphous silicon film.
 18. A semiconductor devicefor an active matrix type liquid crystal display having an peripheraldriving circuit portion and a picture element portion, comprising:asubstrate; and a plurality of thin film transistors formed on thesubstrate, wherein at least one of the thin film transistors is providedin the peripheral driving circuit portion and at least another one ofthe thin film transistors is provided in the picture element portion,and wherein the thin film transistor provided in the peripheral drivingcircuit portion has a crystalline silicon film including crystals havinga crystal growth direction which coincides with a carrier movingdirection and the thin film transistors provided in the picture elementportion has an amorphous silicon film.
 19. A semiconductor devicecomprising:a substrate; and a plurality of thin film transistors formedon the substrate, wherein at least one of the thin film transistors hasa semiconductor film which has a first crystallinity and includescrystals having a crystal growth direction in parallel to the substrateand at least another one of the thin film transistors has asemiconductor film having a second crystallinity lower than the firstcrystallinity.
 20. A semiconductor device comprising:a substrate; and aplurality of thin film transistors formed on the substrate, wherein atleast one of the thin film transistors has a crystalline silicon filmincluding crystals having a crystal growth direction in parallel to thesubstrate and at least another one of the thin film transistors has anamorphous silicon film, and wherein the crystalline silicon film and theamorphous silicon film each includes hydrogen.
 21. A semiconductordevice comprising:a substrate; and a plurality of thin film transistorsformed on the substrate, wherein at least one of the thin filmtransistors has a crystalline silicon film including crystals having acrystal growth direction in parallel to the substrate and at leastanother one of the thin film transistors has an amorphous silicon film,and wherein the crystalline silicon film includes nickel.
 22. The deviceof claim 21 wherein the nickel has a concentration of 1×10¹⁵ to 5×10¹⁹atoms/cm³.
 23. A semiconductor device comprising:a substrate; and aplurality of thin film transistors formed on the substrate, wherein atleast one of the thin film transistors has a crystalline silicon filmincluding crystals having a crystal growth direction in parallel to thesubstrate and at least another one of the thin film transistors has anamorphous silicon film, and wherein the crystalline silicon film and theamorphous silicon film each includes nickel and a concentration ofnickel included in the crystalline silicon film is higher than thatincluded in the amorphous silicon film.
 24. The device of claim 23wherein the nickel has a concentration of 1×10¹⁵ to 5×10¹⁹ atoms/cm³ inthe crystalline silicon film.